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Abstract

This paper describes a metal deposition process using micro electrical discharge machining (micro EDM) to fabricate microstructures. Steel is used for the tool electrode, and the EDM process is carried out in air. By feeding the tool electrode in the vertical direction, a micro rod with 0.14mm in diameter and 2.2mm in height is formed on the workpiece surface. A fillet-like line with uniform thickness is also drawn over the workpiece surface when the horizontal feed is applied independently of the servomechanism of the EDM machine and the horizontal feed rate is kept constant. It is considered from the observation of the discharging surface that the local gap distance at a discharge location becomes larger than that at other locations on the discharging surface and, therefore, the discharge points are not concentrated at a single point but distributed over the discharging surface.

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© 2002 Kluwer Academic Publishers

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Hayakawa, S., Ori, R.I., Itoigawa, F., Nakamura, T., Matsubara, T. (2002). Micro Fabrication Using EDM Deposition. In: Inasaki, I. (eds) Initiatives of Precision Engineering at the Beginning of a Millennium. Springer, Boston, MA. https://doi.org/10.1007/0-306-47000-4_13

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  • DOI: https://doi.org/10.1007/0-306-47000-4_13

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-7923-7414-5

  • Online ISBN: 978-0-306-47000-4

  • eBook Packages: Springer Book Archive

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