Skip to main content
SpringerLink
Log in

Interference Displacement Measurement of Semiconductor Pressure Sensor

  • Conference paper
IUTAM Symposium on Advanced Optical Methods and Applications in Solid Mechanics

Part of the book series: Solid Mechanics and its Applications ((SMIA,volume 82))

Abstract

The paper deals with the deflection measurement of membrane of the semiconductor pressure sensor under load. Optical interferometry was applied to measure deflection. On the base of obtained deformation the state of stress in the membrane is determined. Description of the experimental set-up, results and the analysis of measurement accuracy are presented.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Azgin Z., Gniazdowski Z., Jachowicz R.: Temperature effects in micromechanical sensors concerning interactions housing-sensor, Proc. of VI Conference Scientific Electron Technology ELTE’97, Krynica Poland, May 1997 (in polish).

    Google Scholar 

  2. Gniazdowski Z., Kowalski P.: Practical approach to extraction of piezoresistance coefficient, Sensors & Actuators: A Physical, Vol. 68/1-3, 1998.

    Google Scholar 

  3. Gniazdowski Z.: Finite element modelling in microsystems technology, MST News Poland, No 2(6), July 1997.

    Google Scholar 

  4. Timoshenko S., Woinowsky-Krieger S. Theory of Plates and Shells, McGraw Hill, New York 1959.

    Google Scholar 

  5. Pancewicz T., Jachowicz R., Gniazdowski Z., Azgin Z., Kowalski P.: A new empirical method for modelling results verification for semiconductor pressure sensor, Proc. of EUROSENSORS XII University of Southampton 13–16 Sept. 1998.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Aeronautics & Applied Mechanics, Warsaw University of Technology, ul. Nowowiejska 24, 00-665, Warszawa, Poland

    Tomasz Pancewicz

Authors
  1. Tomasz Pancewicz
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Laboratoire de Mécanique des Solides, University of Poitiers, Poitiers, France

    Alexis Lagarde

Rights and permissions

Reprints and permissions

Copyright information

© 2000 Kluwer Academic Publishers

About this paper

Cite this paper

Pancewicz, T. (2000). Interference Displacement Measurement of Semiconductor Pressure Sensor. In: Lagarde, A. (eds) IUTAM Symposium on Advanced Optical Methods and Applications in Solid Mechanics. Solid Mechanics and its Applications, vol 82. Springer, Dordrecht. https://doi.org/10.1007/0-306-46948-0_47

Download citation

  • DOI: https://doi.org/10.1007/0-306-46948-0_47

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-0-7923-6604-1

  • Online ISBN: 978-0-306-46948-0

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation