Abstract
When a specimen surface carrying a high-frequency line grating is examined under a scanning electron microscope (SEM), moire fringes are observed at several different magnifications. The fringes are characterized by their spatial frequency, orientation, and contrast. These features depend on the spatial frequency mismatch between the specimen grating and the raster scan lines, the diameter of the electron beam, and the detailed topography of the lines on the specimen.
A mathematical model of e-beam moire is developed that depicts the spatial dependence of the SEM image brightness as a product of the local intensity of the scanning beam and the local scattering function from the specimen grating. Equations are derived that show the spatial frequency of the moire fringes as functions of the microscope settings and the spatial frequency of the specimen grating. The model also describes the contrast of several different types of moire fringes observed at different magnifications. The different types of fringe patterns are divided into categories including: natural fringes, fringes of multiplication, and fringes of division.
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© 2000 Kluwer Academic Publishers
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Read, D.T., Dally, J.W. (2000). Theory of Moiré Fringe Formation with an Electron Beam. In: Lagarde, A. (eds) IUTAM Symposium on Advanced Optical Methods and Applications in Solid Mechanics. Solid Mechanics and its Applications, vol 82. Springer, Dordrecht. https://doi.org/10.1007/0-306-46948-0_12
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DOI: https://doi.org/10.1007/0-306-46948-0_12
Publisher Name: Springer, Dordrecht
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