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Design and Simulation of 3D MEMS Actuating System for Optical Scanning Application

  • Shivani RathoreEmail author
  • Deepak Bhatia
Conference paper
  • 36 Downloads
Part of the Algorithms for Intelligent Systems book series (AIS)

Abstract

Modelling and simulation of an electrothermal biaxial MEMS actuator system for 3D optical coherent tomography (OCT) for different materials are reported. The materials with coefficient of thermal expansion (CTE) that have large difference can generate notable displacement. The selected materials are SiO2-Al, polyimide-PVDF and Al-polysilicon. Due to integration of all scanner components in a single MEMS device provides appreciable decrease in optical losses. The main aim of this paper is to analyse the displacement in x- and y-directions MEMS actuator for different types of materials. Simulated results reveal the fact that the material not only achieves better displacement, but also that the power consumption is also low.

Keywords

MEMS actuator Al-SiO2 bimorph beam CTE Polyimide-PVDF OCT 

References

  1. 1.
    Usher-Smith JA, Emerly FJ, Kassianos AP, Walter FM (2014) Risk prediction models for melanoma a systematic review. Cancer Epidemiol Biomark Prevent 23(8):1450–1465Google Scholar
  2. 2.
    Sun J, Xie H (2011) MEMS based endoscopic optical coherence tomography. Int J Opt, vol 2011Google Scholar
  3. 3.
    Medlumics SL (2014) Optical beam scanner. U. S. Patent 9 690 093 B2, 15 Oct 2014Google Scholar
  4. 4.
    Guerra P, Valverde JJ, Martin A, Ledesma MJ, Rubio-Guivernau JL, Santos A (2015) Real time signal processing and Data Handling with dedicated hardware in handheld OCT Device. J Instrum 10:C11001CrossRefGoogle Scholar
  5. 5.
    Jovic A, Pandraud G, Losilla NS, Sancho J, Zinoview K, Rubio JL, Ballbas EM, Sarro PM, (2018) A MEMS actuator system for an integrated 3D optical coherent tomography scanner. J Micro Electro Mech SystGoogle Scholar
  6. 6.
    Jovic A et al (2017) Two novel MEMS actuator systems for self-aligned integrated 3D optical tomography scanners. In: Proceedings IEEE 30th international conference micro electro mechanical system (MEMS), Las Vegas, NV, USA, pp 797–800, Jan 2017Google Scholar
  7. 7.
    Jeung WK, Choi SM, Kim YJ (2016) Large displacement polymer bimorph actuator for out-of-plane motion. J Electr Eng Technol 1(2):263–267CrossRefGoogle Scholar
  8. 8.
    Shen D, Park JH, Ajitsaria J, Choe SY, Wikle HC, Kim DJ (2018) The design, fabrication and evaluation of MEMS PZT cantilever with an integrated Si proofmass for vibration energy harvesting. J Micromech MicroengGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2020

Authors and Affiliations

  1. 1.Rajasthan Technical UniversityKotaIndia

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