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High-Speed Rotation-Type Laser Heat-Mode Lithography System

  • Jingsong WeiEmail author
Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 291)

Abstract

Laser heat-mode lithography can write micro/nanostructures on the heat-sensitive resist thin-film materials. When one uses the traditional direct laser writing system to conduct heat-mode lithography, the writing speed is slow. For example, the real velocity of traditional xy-type vector-mode writing is only several millimeters or centimeters per second due to continuous deceleration.

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Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina

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