High-Speed Rotation-Type Laser Heat-Mode Lithography System

  • Jingsong WeiEmail author
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 291)


Laser heat-mode lithography can write micro/nanostructures on the heat-sensitive resist thin-film materials. When one uses the traditional direct laser writing system to conduct heat-mode lithography, the writing speed is slow. For example, the real velocity of traditional xy-type vector-mode writing is only several millimeters or centimeters per second due to continuous deceleration.


  1. 1.
    J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, M. Xiao, High-speed maskless nanolithography with visible light based on photothermal localization. Sci. Rep. 7, 43892 (2017)ADSCrossRefGoogle Scholar
  2. 2.
    H. W. Wu, M. C. Li, C. T. Yang, C. T. Cheng, S. C. Chen, D. R. Huang, Organic thermal mode photoresists for applications in nanolithography. Supplemental Proc. Mater. Process. Interfaces 1, 663–668 (2012)CrossRefGoogle Scholar
  3. 3.
    C. Yang, C. Chen, C. Huang, Y. Lee, S. Chen, C. Cheng, Single wavelength blue-laser optical head-like opto-mechanical system for turntable thermal mode lithography and stamper fabrication. IEEE Trans. Magn. 47(3), 701–705 (2011)ADSCrossRefGoogle Scholar
  4. 4.
    Z. Bai, J. Wei, Focusing error detection based on astigmatic method with a double cylindrical lens group. Opt. Laser Technol. 106, 145–151 (2018)ADSCrossRefGoogle Scholar
  5. 5.
    X. Liang, Z. Bai, J. Wei, Movement flatness error measurement based on an astigmatic method. Appl. Opt. 56, 4347–4352 (2017)ADSCrossRefGoogle Scholar
  6. 6.
    Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, R. Wang, High-speed laser writing of arbitrary patterns in polar coordinate system. Rev. Sci. Instrum. 87, 125118 (2016)ADSCrossRefGoogle Scholar
  7. 7.
    R. Wang, J. Wei, Y. Fan, Chalcogenide phase-change thin films used as grayscale photolithography materials. Opt. Express 22(5), 4973–4984 (2014)ADSCrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina

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