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Principles of Laser Heat-Mode Lithography

  • Jingsong WeiEmail author
Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 291)

Abstract

Photolithography is actually the interaction of the light with photoresist. It is well known that light is not only information carrier, but also energy carrier. The lithography transfers both information and energy. On one hand, the light can transfer information into photoresists to form pattern structures based on the function of information carrier of light; on the other hand, the feature size of pattern structures can be reduced based on the function of energy carrier of light.

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Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina

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