Study on IoT and Big Data Analysis of Furnace Process Exhaust Gas Leakage

  • Yu-Wen Zhou
  • Kuo-Chi ChangEmail author
  • Jeng-Shyang Pan
  • Kai-Chun Chu
  • Der-Juinn Horng
  • Yuh-Chung Lin
  • Huang Jing
Conference paper
Part of the Smart Innovation, Systems and Technologies book series (SIST, volume 156)


Modern FABs use a large number of high-energy processes such as plasma, CVD, and ion implantation; the furnace is one of the important tools of semiconductor manufacturing. The FAB installed FTIR system due to the 12” furnace tools based on the aforementioned production management requirements. This study used open-type FTIR and integrated IoT mechanism to connect to the cloud, which is suitable for a variety of gaseous pollutants. This study set up two measuring points of furnace process tools in the 12” factory of Hsinchu Science Park in Taiwan. This study obtained FTIR measurements, and according to the OHSA regulations, this study is set in the cloud database for big data analysis and decision-making, when the upper limits of TEOS, C2H4, and CO are 0.6 ppm, 2.0 ppm, and 1.7 ppm and the lower limits of TEOS, C2H4, and CO are 0.4 ppm, 1.5 ppm, and 1 ppm. The application architecture of this study can be extended to other semiconductor processes, so that IoT integration and big data operations can be performed for all processes; this is an important step in promoting FAB intelligent production and an important contribution of this study.


IoT Big data Furnace Exhaust gas Gas leakage 


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Copyright information

© Springer Nature Singapore Pte Ltd. 2020

Authors and Affiliations

  • Yu-Wen Zhou
    • 1
  • Kuo-Chi Chang
    • 1
    Email author
  • Jeng-Shyang Pan
    • 1
  • Kai-Chun Chu
    • 2
  • Der-Juinn Horng
    • 2
  • Yuh-Chung Lin
    • 1
  • Huang Jing
    • 3
  1. 1.Fujian Provincial Key Laboratory of Big Data Mining and ApplicationsFujian University of TechnologyFuzhouChina
  2. 2.Department of Business Administration Group of Strategic ManagementNational Central UniversityTaoyuanTaiwan
  3. 3.College of Information Science and EngineeringFujian University of TechnologyFuzhouChina

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