Study of Giant Magnetostrictive Thin Film Pressure Sensor Based on Villari Effect
Pressure sensor can be used from industrial production to modern life with fast-growing technology and high-pursuit performance. Because of the advantages of strong magnetostrictive effect, high response speed, noncontact drive, and high electromechanical coupling, giant magnetostrictive thin film are not only used to miniaturize the sensor dimension, but also makes the sensitivity improved significantly. The induced voltage value of sensor detection coil can be determined by the intensity of external pressure and magnetic field. Meanwhile, the variation rate of magnetization depends on the differential magnetic susceptibility and the magneto-mechanical effect change rate by Villari effect, so a hysteretic nonlinear magneto-mechanical coupling model is established based on the J-A model and the law of energy conservation in this paper. The COMSOL simulation results show that the magnetization curve of the model can describe the magnetization trend and hysteresis characteristics better, and the relationship between input pressure and output voltage can be predicted, which verifies the correctness and accuracy.
KeywordsPressure sensor Villari effect Giant magnetostrictive thin film Coupling model
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