Modelling of Piezoelectric MEMS in Biomedical Applications

  • A. AvramEmail author
  • R. C. Bogdan
  • A. Bojiță
  • M. Purcar
Conference paper
Part of the IFMBE Proceedings book series (IFMBE, volume 71)


The article provides to the reader a brief of the piezoelectric materials characteristics and their possibilities in biomedical microdevices development. The first section of this article presents the basics of piezoelectric MEMS. The research is focused on microgrippers since this technology is widely used in biomedical applications. The second section of this article present a review of both the direct and inverse piezoelectric effects and the piezoelectric coupling formulation used for modelling biomedical microgrippers. An analysis of piezoelectric gripper based on finite-element calculations is presented in which the fundamental electroelastic equations governing piezoelectric media are solved numerically. A study on how different geometries, different piezoelectric materials and even different mesh densities influences the performances of the microgripper are described in the last section of this article. The experimental results confirm their efficiency and demonstrate that the piezoelectric microgrippers are well suited in biomedical applications.


MEMS Piezoelectric devices Micro grippers Biomedical applications 



The research activities were supported through an UTCN internal grant CI2017, Nr. 1989/12.07.2017.

Conflict of Interest

The authors declare that they have no conflict of interest.


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Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  • A. Avram
    • 1
    Email author
  • R. C. Bogdan
    • 1
  • A. Bojiță
    • 1
  • M. Purcar
    • 1
  1. 1.Department of Electrotechnics and MeasurementsTechnical University of Cluj-NapocaCluj-NapocaRomania

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