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Self-organized Growth by Sputtering and Other PVD Techniques

  • Yu. O. KosminskaEmail author
  • V. I. Perekrestov
Conference paper
Part of the Lecture Notes in Mechanical Engineering book series (LNME)

Abstract

This paper presents a brief review on known self-organized growth by deposition and reports on a new approach of self-organized growth of micro- and nanostructures that can be realized by modified magnetron sputtering. Since self-organization phenomena are multidisciplinary, general ideas on self-organization and related concepts are considered first. Then, known methods of porous structure fabrication in contrast to solid layers and established self-organized growth types are discussed with an emphasis on using PVD techniques. Finally, new steps in plasma-assisted self-organized growth under quasi-equilibrium conditions are presented.

Keywords

Self-organization Sputtering Quasi-equilibrium conditions Growth mechanism PVD 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Department of NanoelectronicsSumy State UniversitySumyUkraine

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