Sensing Devices of Semiconducting Metal Oxides Gas Sensors

  • Yonghui Deng


Semiconducting metal oxide gas sensors are increasingly penetrating mass-market applications, including automotive applications, diagnosis of diseases via breath analysis, home alliances as well as traditional fields such as toxic and explosive gas alarms. A semiconducting gas sensor can be considered as a device into which semiconducting materials are incorporated. A variety of semiconducting gas sensors has been developed with diverse physical structures, different sensing materials and involving various working principles. These sensors may be based on the transduction principle (resistive/conductometric, capacitive, etc.), measure (pressure, temperature, stress, etc.) and materials (semiconductors, piezoelectric ceramic, oxides, etc.). They can also be based on technology (thin-/thick-film MEMS) and applications (aerospace, industry, automobile) or simply based on the properties of the sensor (piezoelectric, magnetic, optical, etc.).


Resistor type sensors Sensing materials MEMS platforms Field effect transistor 


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© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  • Yonghui Deng
    • 1
  1. 1.Department of ChemistryFudan UniversityShanghaiChina

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