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Guide to Silicon-Based Materials

  • Tatsuya Shimoda
Chapter

Abstract

This chapter is a guidance of the materials and processes related to liquid silicon. Each topic is introduced from chapter to chapter based on the process flow shown in Fig. 2.2. The intestine terms are liquid silicon family materials (LSFMs), which are an assembly of the required materials to fabricate MOSFET base on the liquid process. Most of them can be synthesized by using cyclopentasilane (CPS).

Keywords

Liquid silicon Cyclopentasilane (CPS) Silicon ink Polysilane Liquid vapor deposition 

Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  • Tatsuya Shimoda
    • 1
  1. 1.Japan Advanced Institute of Science and TechnologyNomiJapan

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