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Future Prospects of SiC Thermoelectrical Sensing Devices

  • Toan Dinh
  • Nam-Trung Nguyen
  • Dzung Viet Dao
Chapter
Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Abstract

This chapter presents the future prospect of SiC MEMS thermoelectrical sensing devices in terms of the development of new platform and integration capability of SiC with other materials for high-temperature applications. The chapter also describes the possibility of using the thermoelectrical effect in SiC for possible applications in sensing systems, including resonant sensors. Challenges and opportunities for the development of SiC thermal devices in high-temperature applications will also be discussed.

Keywords

SiC on insulator SiC integrated devices High-temperature SiC sensors 

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Copyright information

© The Author(s) 2018

Authors and Affiliations

  1. 1.Queensland Micro- and Nanotechnology Centre (QMNC)Griffth UniversityBrisbaneAustralia
  2. 2.Queensland Micro- and Nanotechnology Centre (QMNC)Griffith UniversityBrisbaneAustralia
  3. 3.School of Engineering and Built EnvironmentGriffith UniversitySouthportAustralia

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