Characterization of Kinoform X-Ray Lens Using Image Stitching Method Based on Marked Structures
The unique structure of the kinoform x-ray lens render most image stitching methods difficult to realize the image registration of sub-images acquired by commercial optical microscope with the high power objective, yet it is important to evaluate the fabrication defects using image processing methods in the foundation of the stitched image. In this work we demonstrate the quantitative characterization of the kinoform x-ray lens by using image stitching method based on extracting the geometric features of dedicated marked structures, which could not only avoid the problem of lacking effective features in the lens structure but also provide a reference for the scaling and rotation operations during the image alignment. The proposed stitching method provides us a convenient way to analyze the shape error and various fabrication imperfections for the kinoform x-ray lens.
KeywordsImage stitching Image process X-ray optics
This work is supported by China Postdoctoral Science Foundation (2017M610996), National Key R&D Program of China (2017YFA0403801), National Natural Science Foundation of China (11505278,11675253).