Design of Micro-heater on 3D-SnO2 Gas Sensor

  • Gajendrasingh Y. RajputEmail author
  • Manoj S. Gofane
  • Sandip Dhobale
Conference paper
Part of the Advances in Intelligent Systems and Computing book series (AISC, volume 810)


Design of the heater on resistive gas sensors plays an important role since the performance of the gas sensor depends on temperature of the sensing materials. Heater on the SnO2 gas sensor is designed in 3D geometry. The meander structure of heater is designed in such a way that the distribution of temperature is uniform on the sensor. COMSOL Multiphysics 5.0 simulating tool based on finite element method is used to study Joules heating in heater. Temperature of the sensor is maintained in the range of 617–621 K (344–348 °C). Uniform distribution of temperature is found on the surface of the sensors with variation of ±2 °C.


SnO2 gas sensor Micro-heater COMSOL Multiphysics 


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Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  • Gajendrasingh Y. Rajput
    • 1
    Email author
  • Manoj S. Gofane
    • 1
  • Sandip Dhobale
    • 1
  1. 1.Department of Electronics EngineeringRamrao Adik Institute of TechnologyNerul, Navi MumbaiIndia

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