Rutherford Backscattering Spectrometry

  • Daiichiro SekibaEmail author


RBS is a method to determine the absolute elemental composition, usually of thin films (t ~ several tens or hundreds nm) deposited on substrates.


Rutherford scattering Ion beam analysis Electrostatic accelerator 


  1. 1.
    Rutherford, E.: LXXIX. The scattering of α and β particles by matter and the structure of the atom, Philosophical Magazine Series 6, 21: 669–688, (1911)Google Scholar
  2. 2.
    Bragg, W.-H., Kleeman, R.: XXXIX. On the a particle of Radium, and their loss of range in passing through various atoms and molecules, Phil. Mag. Dec. 318–340, (1904)Google Scholar
  3. 3.
    For example, SIMNRA, (
  4. 4.
    Huiberts, J.-N., Griessen, R., Rector, J.-H., Wijngaarden, R.-J., Dekker, J.-P., de Groot, D.-G., Koeman, N.-J.: Yttrium and lanthanum hydride films with switchable optical properties. Nature 380, 231–234 (1996)CrossRefGoogle Scholar
  5. 5.
    Sekiba, D., Horikoshi, M., Abe, S., Ishii, S.: Mg segregation in Mg-rich Mg-Ni switchable mirror studied by Rutherford backscattering, elastic recoil detection analysis, and nuclear reaction analysis, J. Appl. Phys. 106, 114912/1–114912/5 (2009)CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Institute of Applied PhysicsUniversity of Tsukuba Tandem Accelerator ComplexTsukubaJapan

Personalised recommendations