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Auger Electron Spectroscopy

  • Fumihiko MatsuiEmail author
Chapter

Abstract

As each element carries unique values of core-level binding energies, EC, this has enabled the development of numerous elemental composition analysis methods based on core electron excitation.

Keywords

Elemental composition Depth analysis Microscopy 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Graduate School of Materials ScienceNara Institute of Science and TechnologyNaraJapan

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