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Multiple-Probe Scanning Probe Microscope

  • Tomonobu NakayamaEmail author
Chapter

Abstract

Multiple-probe scanning probe microscope (MP-SPM) was developed to overcome difficulties in characterizing physical properties of nanoscale structures and materials with conventional SPM families, such as a scanning tunneling microscope (STM), an atomic force microscope (AFM), and the related proximal probe microscopes.

Keywords

Scanning probe microscope Nanocharacterization Electrical measurements 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.International Center for Materials Nanoarchitectonics (MANA)National Institute for Materials Science (NIMS)TsukubaJapan

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