Microprobe Reflection High-Energy Electron Diffraction
Microprobe reflection high-energy electron diffraction (μ-RHEED) is a reflection high-energy electron diffraction (RHEED) that uses focused electron beams with about 10 nm diameter. The focused electron beams with higher than 10 keV kinetic energy are irradiated on sample surfaces at grazing angles less than 5° to get RHEED patterns from the sample surface nanoareas and analyze their crystallinities.
KeywordsSurface Interface Crystallinity Structure Topography
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