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Microprobe Reflection High-Energy Electron Diffraction

  • Masakazu IchikawaEmail author
Chapter

Abstract

Microprobe reflection high-energy electron diffraction (μ-RHEED) is a reflection high-energy electron diffraction (RHEED) that uses focused electron beams with about 10 nm diameter. The focused electron beams with higher than 10 keV kinetic energy are irradiated on sample surfaces at grazing angles less than 5° to get RHEED patterns from the sample surface nanoareas and analyze their crystallinities.

Keywords

Surface Interface Crystallinity Structure Topography 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Applied Physics, Graduate School of EngineeringThe University of TokyoTokyoJapan

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