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Interferometer Displacement Measurement

  • Masaya TodaEmail author
Chapter

Abstract

The displacement measurement using optical interferometry is based on the observation of an interferogram caused by interfering two reflected lights from a sample surface and a reference mirror surface.

Keywords

Surface profile Topography Deflection Bending 

References

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    Toda, M., Seo, Y.J., Kawai, Y., Miyashita, H., Ono, T.: Proceedings of the International Microprocesses & Nanotechnology Conference 25, 1P. (2012)Google Scholar
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    Sato, M.K., Toda, M., Inomata, N., Maruyama, H., Okamatsu-Ogura, Y., Arai, F., Ono, T., Ishijima, A., Inoue, Y.: Biophys. J. 106, 2458 (2014)CrossRefGoogle Scholar
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    Mohd, N., Inomata, N., Toan, N.V., Ono, T., Toda, M.: Proceedings of the International Workshop on Nanomechanical Sensors (2016)Google Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Graduate School of EngineeringTohoku UniversitySendaiJapan

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