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Imaging Ellipsometry

  • Akiko N. ItakuraEmail author
Chapter

Abstract

The measured signals in imaging ellipsometry are the change in polarization as the incident radiation interacts with the material structure of interest at each point on the surface.

Keywords

Optical constant Polarization change Imaging Thickness mapping Surface uniformity 

References

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    Azzam, R.M.A., Bashara, N.M.: Ellipsometry and Polarized Light. North Holland, Amsterdam (1987)CrossRefGoogle Scholar
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    Tompkins, H.G., Irene, E.A.: Handbook of Ellipsometre. Willian An drew, New York (2005)CrossRefGoogle Scholar
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    Fried, M., Juhasz, G., Major, C., Petrik, P., Polgar, O., Horvath, Z., Nutsch, A.: Thin Solid Films 519, 2730–2736 (2011)CrossRefGoogle Scholar
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    Röling, C., Thiesen, P., Meshalkin, A., Achimova, E., Abashkin, V., Prisacar, A., Triduh, G.: J. Non-Cryst. Solids 365, 93–98 (2013)CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Surface Physics and Characterization GroupNational Institute for Materials ScienceTsukubaJapan

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