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High-Resolution Elastic Recoil Detection Analysis

  • Kaoru NakajimaEmail author
Chapter

Abstract

HERDA is an advanced type of Elastic Recoil Detection Analysis (ERDA), depth resolution of which is improved. Figure 40.1 shows a schematic illustration of HERDA. In HERDA, as in a conventional ERDA, a well-collimated beam of monoenergetic He or heavier ions is incident on a solid sample.
Fig. 40.1

Schematic illustration of HERDA

Keywords

Ion scattering Hydrogen Light element Depth profiling High depth resolution 

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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Micro Engineering, Graduate School of EngineeringKyoto UniversityKyotoJapan

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