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Glow Discharge Optical Emission Spectrometry

  • Patrick ChaponEmail author
  • Sofia Gaiaschi
  • Kenichi Shimizu
Chapter

Abstract

GDOES [1] is a spectrochemical technique that allows direct in-depth determination of major and trace elements. In GDOES a pulsed radio frequency

Keywords

Plasma Elemental analysis Fast depth profiling Thin and thick films 

References

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  • Patrick Chapon
    • 1
    Email author
  • Sofia Gaiaschi
    • 1
  • Kenichi Shimizu
    • 2
  1. 1.HORIBA France SASPalaiseauFrance
  2. 2.Keio UniversityYokohamaJapan

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