Advertisement

Environmental SEM (Atmospheric SEM)

  • Yusuke OminamiEmail author
Chapter

Abstract

Conventional SEM normally has vacuum environment between electron optic column and specimen chamber so that electron beam-emitted electron source travels to specimen without being scattered by gas molecular.

Keywords

Environmental Variable pressure Low vacuum Atmospheric pressure 

References

  1. 1.
    Danilatos, G.D., Robinson, V.N.E.: Principles of scanning electron microscopy at high specimen pressures. Scanning 2, 72–82 (1979)CrossRefGoogle Scholar
  2. 2.
    Danilatos, G.D.: Design and construction of an atmospheric or environmental SEM (part 3). Scanning 7, 26–42 (1985)CrossRefGoogle Scholar
  3. 3.
    Ominami, Y., et al.: A Novel Approach to Scanning Electron Microscopy at Ambient Atmospheric Pressure. Microscopy 64, 97–104 (2015)CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Science Systems Product DivisionHitachi High-Technologies CorporationIbarakiJapan

Personalised recommendations