In general, since the amplitude and phase are different between the p- and s-polarizations of the reflected light, the reflected light is elliptically polarized. Ellipsometry precisely measures the shape of reflection ellipse by irradiating totally polarized light to a planer bulk surface, a thin film, and a multilayer.
KeywordsPolarization Reflection Complex refractive index Film thickness Complex amplitude reflectance
- 2.Tompkins, H.G., McGahan, W.A.: Spectroscopic ellipsometry and reflectometry: a user’s guide. Wiley, New York (1999)Google Scholar