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Electron Probe Microanalysis

  • Hiroshi SakamaeEmail author
Chapter

Abstract

When an accelerated electron strikes a substance, it sometimes ejects the inner shell electron of the atom existing in the substance and creates a vacancy. This phenomenon is called electron beam excitation.

Keywords

Electron beam excitation Characteristic X-ray WDS Trace elements 

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Surface Analysis Business Unit, Analytical & Measuring Instruments DivisionShimadzu CorporationKyotoJapan

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