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X-Ray Photoelectron Spectroscopy

  • Makoto NakamuraEmail author
Chapter

Abstract

When an X-ray is irradiated to a solid sample, electrons are emitted by photoelectric and Auger effects.

Keywords

Photoelectron Auger electron Spectroscopy X-ray Surface analysis Chemical state 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Device, & Materials LaboratoriesFujitsu Laboratory LtdKanagawaJapan

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