Total Reflection X-Ray Fluorescence

  • Jun KawaiEmail author


Monochromatic or non-monochromatic X-rays from an X-ray tube or a synchrotron radiation beamline impinge on a flat surface at a glancing angle less than the critical angle of X-ray total reflection (usually around 0.1°), and the incident X-rays are totally reflected by the flat surface. The electric field of the incident X-rays exists at the surface from the top layer to a few nanometer depth. This electric field is called an evanescent wave. This electric field of X-rays ionizes an inner-shell electron, and consequently, X-ray fluorescence is emitted. The X-ray fluorescence (XRF) is a term refers to the characteristic X-ray emission due to X-ray excitation.


Trace analysis Elemental analysis Silicon wafer analysis Environmental analysis 


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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Materials Science and EngineeringKyoto UniversityKyotoJapan

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