Time-of-Flight Secondary Ion Mass Spectrometry

  • Satoka AoyagiEmail author


Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is one of the most powerful surface analysis methods in terms of high sensitivity, high spatial resolution imaging, and detailed chemical information.


Secondary ion MS imaging Depth profiling Primary ion beam Fragment ion 


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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Materials and Life ScienceSeikei UniversityTokyoJapan

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