Spectroscopic Ellipsometry

  • Takumi MoriyamaEmail author


When the linearly polarized light is reflected from a clean surface or a surface covered by a thin film, its polarization changes and the light becomes elliptically polarized. Ellipsometry measures this change in the polarization state of light upon reflection from a surface (Azzam, Bashara in Ellipsometry and Polarized Light. North Holland, Amsterdam, 1987 [1]; Tompkins, Irene in Handbook of Ellipsometre. New York, 2005 [2]). As a result of the measurement, ellipsometric angles Ψ & Δ are obtained.


Polarization Optical constants Refractive index Dielectric constant Film thickness 


  1. 1.
    Azzam, R.M.A., Bashara, N.M.: Ellipsometry and Polarized Light, North Holland, Amsterdam (1987)Google Scholar
  2. 2.
    Tompkins, H.G., Irene, E.A.: Handbook of Ellipsometry, Willian Andrew, New York (2005)Google Scholar
  3. 3.
    Aspnes D.E.: Handbook of Optical Constants of Solids, chapter 5, 104 (1985)CrossRefGoogle Scholar
  4. 4.
    Hirakawa, S., Nabatova-Gabain, N., Wasai, Y., Iida, H.: HORIBA Technical Reports English edition, 19, vol. 5 (2003)Google Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Analytical Technology Center, HORIBA TECHNO SERVICE Co., LtdKyotoJapan

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