When the linearly polarized light is reflected from a clean surface or a surface covered by a thin film, its polarization changes and the light becomes elliptically polarized. Ellipsometry measures this change in the polarization state of light upon reflection from a surface (Azzam, Bashara in Ellipsometry and Polarized Light. North Holland, Amsterdam, 1987 ; Tompkins, Irene in Handbook of Ellipsometre. New York, 2005 ). As a result of the measurement, ellipsometric angles Ψ & Δ are obtained.
KeywordsPolarization Optical constants Refractive index Dielectric constant Film thickness
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