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Peculiarities of Formation and Characterization of SiO2/Si Ion-Track Template

  • Egor KaniukovEmail author
  • Victoria Bundyukova
  • Maksim Kutuzau
  • Dzmitry Yakimchuk
Conference paper
Part of the NATO Science for Peace and Security Series B: Physics and Biophysics book series (NAPSB)

Abstract

A simple way of forming porous templates of silicon dioxide using ion-track technology was demonstrated. Investigations of the dependence of the characteristics, both of a single pore and of the entire template on the etching time and concentration of etchant were carried out. The possibility of high-precision control of the parameters of porous templates through the post-processing of SEM images in the ImageJ software was demonstrated. An express method for estimating template parameters using ellipsometry was proposed.

Keywords

Nanotechnology Templates Swift heavy ion track technology ImageJ Ellipsometry 

Notes

Acknowledgements

The authors acknowledge the support of the work in frames of H2020 – MSCA – RISE2017 – 778308 – SPINMULTIFILM Project, the Scientific-technical program ‘Technology-SG’ [project number 3.1.5.1], and Belarusian Foundation for Basic Research [project number Ф17М-005].

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Copyright information

© Springer Nature B.V. 2019

Authors and Affiliations

  • Egor Kaniukov
    • 1
    • 2
    Email author
  • Victoria Bundyukova
    • 1
  • Maksim Kutuzau
    • 1
  • Dzmitry Yakimchuk
    • 1
  1. 1.Scientific-Practical Materials Research Centre, NAS of BelarusMinskBelarus
  2. 2.Institute of Chemistry of New Materials, NAS of BelarusMinskBelarus

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