Optimization of the Silicon Nitridation Process

  • B. Q. Lei
  • D. Ashkin
  • T. Johansson
  • T. Lindbäck


By investigating the nitridation processes using a large mass of silicon under different atmospheres, it was found that the nature of heat conduction and mass transport were influenced by the size of the silicon powder compact and/or the number of compacts. Two main reaction maxima were observed and both accelerating as well as retarding influences on the reaction rate could be identified. The extent and starting temperature of the first reaction maximum was found to be greatly influenced by gas composition. Also investigated was the influence of different nitridation atmospheres (N2+Ar, N2+H2, N2+H2+Ar and N2+He) on microstructure of large silicon powder compacts. A homogeneous and complete reaction could be achieved by tailoring the gas composition.


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  1. 1.
    A.J. Moulson, J. of Mater. Sci., Vol.14, (1979), 1017–1051CrossRefGoogle Scholar
  2. 2.
    H.M. Jennings, J. of Mater. Sci., Vol.18, (1983), 951–967CrossRefGoogle Scholar
  3. 3.
    F.L. Riley, Mater. Sci. Forum., Vol. 47, (1989), 70–83CrossRefGoogle Scholar
  4. 4.
    R. Pompe, L. Hermansson, T. Johansson, E. Djurl and M.E. Hatcher, Mater. Sci. and Eng., Vol.71, (1985), 355–362CrossRefGoogle Scholar
  5. 5.
    C.P. Gazzara and D.R. Messier, Bulletin of Am. Ceramic Soc., Vol.56(9), (1977), 777–780Google Scholar
  6. 6.
    M. Barsonm, P. Kangutar and M.J. Koczak, Ceram. Eng. Sci. Proc., Vol.10(7-8), (1989), 795–806Google Scholar
  7. 7.
    W. Mustel and D. Broussaud, Sci. of Ceram. Vol. 12, (1982), 131–137Google Scholar
  8. 8.
    H. Kim and C.H. Kim, J. of Mater. Sci., Vol. 20, (1985), 149–156CrossRefGoogle Scholar
  9. 9.
    H. Kim and C.H. Kim, J. of Mater. Sci., Vol. 20, (1985), 141–148CrossRefGoogle Scholar
  10. 10.
    A.G. Ravesz, J. Non-Crystalline solids, Vol.11, (1973), p309CrossRefGoogle Scholar
  11. 11.
    S.M. Boyer, D. Sang and A.J. Moulson, Nitrogen Ceramics, Ed. by F.L. Riley, Noordhoff, Leyden, (1977), p 297CrossRefGoogle Scholar
  12. 12.
    W. Kaiser and C.D. Thurmond, J. of Appl. Phys., Vol.30(3), (1959), 427–431CrossRefGoogle Scholar
  13. 13.
    C.K. Patel, P.K. Tien and J.H. McFee, Appl. Phys. Letter, Vol.7(11), (1965), 290–292CrossRefGoogle Scholar

Copyright information

© Elsevier Science Publishers Ltd and MPA Stuttgart 1992

Authors and Affiliations

  • B. Q. Lei
    • 1
  • D. Ashkin
    • 1
  • T. Johansson
    • 1
  • T. Lindbäck
    • 1
  1. 1.Department of Engineering MaterialsLuleå University of TechnologyLuleåSweden

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