The Effect of Cleanroom Processing on the Properties of Silicon Nitride
High-tech ceramics offer a spectrum of mechanical properties which cannot be achieved by any other class of materials. This has led to a number of applications as structural materials in motor and machine engineering. A wider application has however been hindered by the large scatter of the mechanical properties. In the past few years, different strengthening concepts have been applied, aiming to increase the damage tolerance1,2). The success of property improvement was remarkable and the understanding of the microstructure property relation developed. Nevertheless, it must be recognized that high-tech ceramics are still brittle materials and that their strength is predominantly determined by processing related defects.
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