Advertisement

The Effect of Cleanroom Processing on the Properties of Silicon Nitride

  • H. Schubert
Chapter

Abstract

High-tech ceramics offer a spectrum of mechanical properties which cannot be achieved by any other class of materials. This has led to a number of applications as structural materials in motor and machine engineering. A wider application has however been hindered by the large scatter of the mechanical properties. In the past few years, different strengthening concepts have been applied, aiming to increase the damage tolerance1,2). The success of property improvement was remarkable and the understanding of the microstructure property relation developed. Nevertheless, it must be recognized that high-tech ceramics are still brittle materials and that their strength is predominantly determined by processing related defects.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1]
    A.G. Evans “ Perspective on the Development of High — Toughness Ceramics” J. o. Am. Ceram. Soc., Vol. 73, No 2, (1990) p187CrossRefGoogle Scholar
  2. 2]
    H. Schubert und G. Petzow “What makes Ceramics Tougher?” in J.O. Materials Education, Vol. 10 No.6 (1988) 601–620Google Scholar
  3. 3]
    V.D. Frechette and J.R. Varner (edt.) Fractography of Glasses and Ceramics, Advances in Ceramics Vol. 22 The American Ceramic Society, Westerville, Ohio, USA, 1986Google Scholar
  4. 4]
    C.L. Quackenbush and J.T. Smith “GTE Sintered Silicon Nitride”Google Scholar
  5. 5]
    D. Sordelet, J. Neil, M. Mahoney and A Hecker “Development of Injection — Molded Gas Turbine Components: Investigation Into Toughening GTE PY6 Si3N4”, Presented at the International Gas Turbine and Aeroengine Congress and Exposition, Orlando, FL June 3-6, 1991, paper 91-GT-65.Google Scholar
  6. 6]
    G. Kaiser, W. Worner, K. Schulze, H. Schubert, G. Petzow “Associated Analysis of Contamination of Si3N4 Clean Room Processing” to be published in Microchemica ActaGoogle Scholar

Copyright information

© Elsevier Science Publishers Ltd and MPA Stuttgart 1992

Authors and Affiliations

  • H. Schubert
    • 1
  1. 1.Pulvermetallurgisches LaboratoriumMax - Planck - Institut für Metallforschung Institut fur WerkstoffwissenschaftStuttgart 80Germany

Personalised recommendations