Advertisement

Verhandlungen pp 267-269 | Cite as

Microanalysis with the X-ray scanning microscope

  • P. Duncumb
Chapter

Abstract

In the normal method of X-ray emission microanalysis, developed by Castaing (1, 2), the specimen surface is positioned optically under a fixed electron probe. With the present equipment (3, 4), the electron probe may be scanned over the specimen and the emitted X-rays collected to form an image of the surface on a cathode-ray tube, which is scanned in synchronism with the probe. An accelerating voltage of about 25 kV is used, and the probe, of diameter 0.1–1 μ, may be scanned over an area up to 0.4 mm square. X-rays may be detected either with or without wavelength discrimination; the crystal spectrometer (or proportional counter and pulse analyser) on the right of the column (Fig. 1) selects a particular characteristic emission line, whereas the scintillation counter on the left accepts the total X-ray emission. In the former case the surface distribution of one element is obtained and, in the latter, contrast is chiefly due to the variation of atomic number over the surface. For specimens thicker than the electron penetration depth, the resolving power is limited to about 1 μ by lateral electron diffusion.
Fig. 1.

Block diagram of the X-ray scanning microscope

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Castaing, R.: Application des sondes électroniques à une methode d’analyse ponctuelle chimique et cristallographique. Thesis, Paris Univ. 1951. 0. N. E. R. A. publ. no. 55.Google Scholar
  2. 2.
    Castaing, R., J. Pxilibert and C. Crussard: J. of Metals 9, 389 (1957).Google Scholar
  3. 3.
    Duxcumb, P., and V. E. Cosslett: Proc. Symposium on X-ray Microscopy and Microradiography, 1956, pp. 374 and 617. Published by Academic Press 1957.Google Scholar
  4. 4.
    Cosslett, V. E., and P. Duncumb: Proc. Stockholm Conference Electr. Microsc. p. 12, 1956.Google Scholar
  5. 5.
    Smith, K. C. A., and C. W. OATLEY: Brit. J. appl. Physics 6, 391 (1955).ADSCrossRefGoogle Scholar
  6. 6.
    Castaing, R., and J. DESCAMPS: Recherche aéronaut. 63, 41 (1958).Google Scholar
  7. 7.
    Liebmann, G.: Proc. Physic. Soc. B 68, 737 (1955).ADSCrossRefGoogle Scholar
  8. 8.
    Liebmann, G.:Proc. Physic. Soc. B 68, 682 (1955).Google Scholar
  9. 9.
    Melford, D. A., and P. Duncumb: Metallurgia 57, 159 (1958).Google Scholar
  10. 10.
    Nixon, W. C.: Proc. roy. Soc. A 232, 475 (1955).ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1960

Authors and Affiliations

  • P. Duncumb
    • 1
  1. 1.Cavendish LaboratoryUniversity of CambridgeEngland

Personalised recommendations