Following the application by Castaing and Guiniet (1) of the electron-optical techniques of electron microscopy to X-ray micro-analysis, a number of instruments (2–5) have been described in the literature. In 1956, an experimental X-ray micro-analyzer (6) was constructed at the A. E. I. Research Laboratory for research into micro-analysis; this instrument has also been used in problems of metallurgy and surface physics (7) in conjunction with electron diffraction and electron microscopy.
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