Properties of silicon—carbon-cluster-assembled films
We have investigated SiC films, obtained by the low-energy cluster beam deposition (LECBD) technique, and using AFM Raman and XPS spectroscopies. We produce these films at room temperature and in an ultrahigh vacuum environment to protect them from the pollution. The inner morphology of the clusters is close to an amorphous-like structure. However, most of the theoretical models predict an sp 3 hybridization, in disagreement with our experimental results. We find that the films are composed mainly by free components formed by rich silicon, rich carbon, and rich SiC regions, respectively, In our case, the mean hybridization of the rich carbon region is mainly sp n -like with 2 < n < 3.
PACS61.46.+w Clusters, nanoparticles, and nanocrystalline materials 81.15.-z Methods of deposition of films and coatings; film growth and epitaxy
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- 1.MRS Bulletin, March 1997, Vol, 22, no. 3Google Scholar
- 4.P. Mélinon, V, Paillard, V. Dupuis, A. Perez, P„iensen, A. Hoareau, M. Broyer, J.L. Vialle, M. Pellarin, B. Bague-nard, J. Lermé: Int. j. Mod. Phys. B 9, 339 (1995)Google Scholar
- 7.L. Calcagno, G. Compagnini, G. Foti, M.G. Grimaldi, P. Mitsumeci: Nucl. Instrum. Methods Phys. Res. B 120, 121: (1996)Google Scholar
- 9.P. Mélinon, P. Kéghélian, B. Prével, A. Perez, G. Guiraud, J. LeBrusq,.J. Lermé, M. Pellarin, M. Broyer:.1. Chem. Phys. 107, 10 278 (1997); P. Mélinon, P. Kéghélian, B. Prével, V. Dupuis, A. Perez, B. Champagnon, Y. Guyot, M. Pellarin, J. Lermé, M. Broyer, J.L. Rousset, P. Delichere: J. Chem. Phys. 108, 4607 (1998)Google Scholar
- J.C. Angus, Y. Wang: in Diamond and Diamond-like Films and Coatings,ed. by R.E. Clausing et al.,NATO AST Series B: Physics Vol. 266 (Plenum Press, New York 1990) pp. 178–190Google Scholar