Physics and Fabrication of Metal-Semiconductor Microstructures

  • E. Rosencher
  • P. A. Badoz
Conference paper
Part of the Springer Series in Solid-State Sciences book series (SSSOL, volume 83)


Thanks to advances in ultra-high vacuum technology, it has recently become possible to realize epitaxial semiconductor/metal/semiconductor (SMS) structures [1, 2] using a Si/CoSi2/Si sandwich. The rather small lattice mismatch (~ 1.2%) between Si and CoSi2 crystals as well as their similar cubic structures allows the production of monocrystalline Si/CoSi2 and Si/CoSi2/Si heterostructures. These SMS structures open the way to promising ultra-low base resistance devices for millimeter wave applications.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1988

Authors and Affiliations

  • E. Rosencher
    • 1
  • P. A. Badoz
    • 1
  1. 1.Centre National d’Etudes des TélécommunicationsMeylan CedexFrance

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