Ellipsometry, in general, determines the complex ratio ρ of linearly independent electric feld components of polarized electromagnetic plane waves. More specific, the change of the polarization state of an electromagnetic plane wave upon interaction with a sample is addressed thereby. Explicitly, for a given mode description in terms of, e.g., p and s polarized fields (amplitudes A stand for incident, B for exiting waves. Figure 2.1)1
KeywordsDielectric Function Spectroscopic Ellipsometry Electromagnetic Plane Wave Mueller Matrix Ellipsometric Parameter
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