Electrical Discharge Characteristics of Magnetized Capacitive Coupled Plasma
A 13.56 MHz magnetized capacitive coupled discharge has been investigated in presence of transverse magnetic field. Plasma impedance is obtained using an electrical circuit model. From the trend of plasma resistance it is observed that the power dissipation mode changes with pressure and with magnetic field. For un-magnetized case, power dissipation is seen to undergo a transition from electron dominated to ion dominated as the sheath potentials increases with increasing RF power whereas in the magnetized case power dissipation remains in the electron dominated mode for given range of discharge current and pressure.
This work is supported by Department of Atomic Energy and Department of Science & Technology, Government of India via Projects GITA/DST/TWN/P-56/2014. We also acknowledge the technical assistance provided by Dhrumil Patel.
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