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Studies on Iodine Based Polishing of HgCdTe Material

  • Radheshyam NokhwalEmail author
  • Anshu Goyal
  • B. L. Sharma
  • Varun Sharma
  • Raghvendra Sahai Saxena
  • R. K. Sharma
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

Surface of Hg1−xCdxTe material epitaxial layers is prepared by Iodine–Potassium Iodide based non-aqueous solution. This solution provides better stoichiometry at the surface compared to conventional bromine based etchant as evident in the X-ray photoelectron spectroscopy. Ellipsometry measurement also indicated the better cleanliness of the surface, when etched with the Iodine–Potassium Iodide chemical solution. The morphology observed under the Nomarski microscope, showed improved surface. The root mean square roughness was measured using AFM at the surface of HgCdTe, prepared by polishing with the iodine–potassium iodide based solution was found to be ~0.74 nm.

Keywords

HgCdTe Roughness Surface morphology XPS 

Notes

Acknowledgements

The authors are grateful to Dr. Ashok Kapoor, Mr. Akhilesh Pandey and Ms. Garima Gupta for using the characterization tools.

References

  1. 1.
    J.B. Varesi et al., Investigation of HgCdTe surface quality following Br-based etching for device fabrication using spectroscopic ellipsometry. J. Electron. Mater. 34(6), 758–761 (2005)ADSCrossRefGoogle Scholar
  2. 2.
    P. Alto et al., United States Patent 4600469, 2005Google Scholar
  3. 3.
    V. Srivastav et al., Etching of mesa structures in HgCdTe. J. Electron. Mater. 34(11), 1440–1445 (2005)ADSCrossRefGoogle Scholar
  4. 4.
    W.H. Chang, T. Lee, W.M. Lau, An X-ray photoelectron spectroscopic study of chemical etching and chemo-mechanical polishing of HgCdTe. J. Appl. Phys. 68(9), 4816–4819 (1990)ADSCrossRefGoogle Scholar
  5. 5.
    K. Maruyama, “Dislocations in Hg1−xCdxTe/Al2O3(sapphire) grown by metalorganic chemical vapor deposition. J. Vac. Sci. Technol. A Vac. Surf. Film. 7(2), 291 (Mar 1989)ADSCrossRefGoogle Scholar
  6. 6.
    R. Nokhwal, V. Srivastav, Surface studies on HgCdTe using non-aqueous iodine-based polishing solution. J. Electron. Mater (2017)Google Scholar
  7. 7.
    W.M. Lau, J.-W. He, P.R. Norton, X-ray photoemission studies of the interfacial reactions of Pt and Au on anodic oxide of Hg0.8Cd0.2Te. Appl. Phys. Lett. 54(8), 772 (1989)ADSCrossRefGoogle Scholar
  8. 8.
    R. Sporken et al., The effect of wet etching on surface properties of HgCdTe. J. Electron. Mater. 38(8), 1781–1789 (2009)ADSCrossRefGoogle Scholar
  9. 9.
    P. Capper, J. Garland, Mercury Cadmium Tellurite, Growth, Properties and Applications (2011)Google Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Radheshyam Nokhwal
    • 1
    Email author
  • Anshu Goyal
    • 1
  • B. L. Sharma
    • 1
  • Varun Sharma
    • 1
  • Raghvendra Sahai Saxena
    • 1
  • R. K. Sharma
    • 1
  1. 1.Solid State Physics LaboratoryNew DelhiIndia

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