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Deposition and Optimization of Zinc Oxide Thin Film Using Its Nano-colloidal Solution for Various Sensing Applications

  • Ashish KumarEmail author
  • R. P. Yadav
  • Vijay Janyani
  • Mahanth Prasad
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

This paper reports the morphology, electrical and optical characterizations of zinc oxide (ZnO) thin films deposited using its nano-colloidal solution by sol-gel technique for various applications such as Acoustic Sensor, FBAR and Gas Acoustic Sensor. The morphological study of deposited film was investigated using Atomic Force Microscopy (AFM). However, the electrical properties of deposited thin film were examined using IV and CV characteristics by making a capacitor on a silicon substrate. Also, the optical property such as photoluminescence (PL) of deposited film was measured.

Notes

Acknowledgements

The Authors would like to express their gratitude to the ministry of electronics and information technology (MEITY) for financial support and MRC centre, MNIT Jaipur for characterization facilities.

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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Ashish Kumar
    • 1
    Email author
  • R. P. Yadav
    • 1
  • Vijay Janyani
    • 1
  • Mahanth Prasad
    • 2
  1. 1.Department of Electronics and Communication EngineeringMalaviya National Institute of Technology JaipurJaipurIndia
  2. 2.Transducers and Actuators GroupCSIR-Central Electronics Engineering Research Institute (CEERI)PilaniIndia

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