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Design and Simulation of Push–Pull Capacitive Accelerometer Structure for Navigation Applications

  • Shaveta RajialEmail author
  • Nidhi Gupta
  • Ramjay Pa
  • Kapil Kumar Jain
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

This paper presents the design of capacitive accelerometer in ±10g range suitable for navigational applications. Push pull structure has been chosen and design has been carried out using SOI wafer. Modal studies has been carried out. Simulation results have been presented. The structure exhibits a sensitivity of 33.6 mV/g along with non linearity of 0.0015%. The 3 dB bandwidth of the accelerometer structure is found to be ~235 Hz.

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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Shaveta Rajial
    • 1
    Email author
  • Nidhi Gupta
    • 1
  • Ramjay Pa
    • 1
  • Kapil Kumar Jain
    • 1
  1. 1.Solid State Physics Laboratory (DRDO)TimarpurIndia

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