A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications
This paper presents a large stroke surface micromachined micromirror platform actuated using inverse-series-connected (ISC) bimorph actuator. The proposed structure is designed using four symmetric ICS bimorph actuator made up of Aluminum and Silicon Dioxide and a micromirror plate of sandwiched layer of SiO2 and Aluminum The platform is capable of producing both piston and tip-tilt motion by application of voltage to Aluminum layer which acts as a constituent layer of ICS bimorph and an electrical heater simultaneously. With a mirror plate size of 500 × 500 µm2, the maximum displacement is 100 µm in piston mode and 69 µm in tip-tilt mode at 0.2 V. The micromirror is capable of scanning with resonance frequencies at 4.31 and 6.70 kHz in piston and torsional mode respectively.
The author acknowledges financial assistance under RESPOND Project sponsored by SAC-ISRO and CSIR-CEERI, India.
- 1.P.F. Van Kessel, L.J. Hornbeck, R.E. Meier, M.R. Douglass, A MEMS based projection display. Proc. IEEE, 86(8) (1998)Google Scholar
- 2.L.J. Hornbeck, W.E. Nelson, Bistable deformable mirror devices. OSA Technical Digest Series vol. 8, Spatial Light modulators and Applications (1988), p. 107Google Scholar
- 8.X. Zhang et.al, A robust, Fast electrothermal micromirror with symmetric bimorph actuator made of copper/ tungsten, in Transducers (Alaska, USA, 2015)Google Scholar