A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications

  • Amit KumarEmail author
  • Deepak Bansal
  • Maninder Kaur
  • Kamaljit Rangra
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)


This paper presents a large stroke surface micromachined micromirror platform actuated using inverse-series-connected (ISC) bimorph actuator. The proposed structure is designed using four symmetric ICS bimorph actuator made up of Aluminum and Silicon Dioxide and a micromirror plate of sandwiched layer of SiO2 and Aluminum The platform is capable of producing both piston and tip-tilt motion by application of voltage to Aluminum layer which acts as a constituent layer of ICS bimorph and an electrical heater simultaneously. With a mirror plate size of 500 × 500 µm2, the maximum displacement is 100 µm in piston mode and 69 µm in tip-tilt mode at 0.2 V. The micromirror is capable of scanning with resonance frequencies at 4.31 and 6.70 kHz in piston and torsional mode respectively.



The author acknowledges financial assistance under RESPOND Project sponsored by SAC-ISRO and CSIR-CEERI, India.


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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Amit Kumar
    • 1
    • 2
    Email author
  • Deepak Bansal
    • 1
    • 2
  • Maninder Kaur
    • 2
  • Kamaljit Rangra
    • 1
    • 2
  1. 1.Academy of Scientific and Innovative ResearchTaramaniIndia
  2. 2.CSIR-Central Electronics Engineering Research InstitutePilaniIndia

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