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Temperature Compensation of MEMS Capacitive Accelerometer for Navigational Application

  • Yashoda ParmarEmail author
  • Shaveta
  • Shankar Dutta
  • Ramjay Pal
  • Kapil Kumar Jain
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

To employ the MEMS device for navigational purpose; temperature stability, bias stability and linearity are the key parameters. In present paper, the effect of temperature variation on the output of z-axis capacitive accelerometer is discussed. In absence of any temperature compensation (TC) circuit, the accelerometer exhibited an out-put variation of 1875 ppm/°C. After employing the suitable TC circuit, the out-put variation is reduced to 75 ppm/°C.

References

  1. 1.
    R.K. Bhan, A.P. Shaveta, Y. Parmar, S. Dutta, R. Pal, Fabrication and characterization of crab-type capacitive MEMS accelerometer for defense applicationsGoogle Scholar
  2. 2.
    G. Liu, F. Yang, X. Bao, J. Tao, Robust optimization of a MEMS accelerometer considering temperature variationsGoogle Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Yashoda Parmar
    • 1
    Email author
  • Shaveta
    • 1
  • Shankar Dutta
    • 1
  • Ramjay Pal
    • 1
  • Kapil Kumar Jain
    • 1
  1. 1.Solid State Physics LaboratoryTimarpur, New DelhiIndia

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