Formation of Surface Micro and Nanostructures When Exposed to Laser UV and VUV Radiation of Nanosecond Duration

  • Vladislav Khomich
  • Vladimir YamshchikovEmail author
  • Sergey Mikolutskiy
Conference paper
Part of the Springer Proceedings in Materials book series (SPM, volume 6)


Micro- and nanostructures improved different surface properties, which is used in various fields of science and technology. It is of a great interest to develop the physical foundations of new effective methods for creation of such structures. The paper proposes a method of direct laser micro- and nanostructuring based on nanosecond lasers with radiation of UV and VUV range. The method allows surface laser treatment of materials with different physical properties: metallic alloys, ceramics, diamond-like films, semiconductors. Formation of surface micro and nanostructures on the surfaces of diamond-like film, germanium, aluminum oxide and zirconium bronze is demonstrated. A theoretical model of nanostructure formation on solid surface melted by nanosecond laser pulse is considered. Moreover, a simple model for formation of conical structures at laser ablation without melting is described.



This research was performed into framework of State assignment of IEE RAS.


  1. 1.
    F. Luo, W. Ong, Y. Guan, F. Li, Sh Sun, G.C. Lim, M. Hong, Appl. Surf. Sci. 328, 405 (2015)CrossRefGoogle Scholar
  2. 2.
    T. Csizmadia, T. Smausz, C. Tapai, J. Kopniczky, X. Wang, M. Ehrhardt, P. Lorenz, K. Zimmer, L. Orosz, E. Varga, E. Oszko, B. Hopp, J. Laser Micro Nanoeng. 10(2), 110 (2015)CrossRefGoogle Scholar
  3. 3.
    V.Yu. Fominskii, S.N. Grigor’ev, R.I. Romanov, V.N. Nevolin. Techn. Phys. 57(4), 516 (2012)Google Scholar
  4. 4.
    Yu.A. Vashukov, S.F. Demichev, V.D. Elenev, T.V. Malinskiy, S.I. Mikolutskiy, Yu.V. Khomich, V.A. Yamshchikov, Appl. Phys. 1, 82 (2019). (in Russian)Google Scholar
  5. 5.
    P.F. Rios, H. Dodiuk, S. Kenig, S. McCarthy, A. Dotan, J. Adhes. Sci. Technol. 20(6), 563 (2006)CrossRefGoogle Scholar
  6. 6.
    K. Vestentoft, J.A. Olesen, B.H. Christensen, P. Balling, Appl. Phys. A 80, 493 (2005)CrossRefGoogle Scholar
  7. 7.
    Y. Nakata, T. Okada, M. Maeda, Proc. SPIE Int. Soc. Opt. Eng. 5662, 749 (2004)Google Scholar
  8. 8.
    X. Wang, Y. Lu, J. Appl. Phys. 98, 114304 (2005)CrossRefGoogle Scholar
  9. 9.
    S.I. Mikolutskiy, V.Yu. Khomich, V.A. Shmakov, V.A. Yamshchikov, Nanotechnol. Russ. 6(11–12), 733 (2011)Google Scholar
  10. 10.
    V.N. Tokarev, V.A. Shmakov, R.R. Khasaya, S.I. Mikolutskiy, S.V. Nebogatkin, V.Yu. Khomich, V.A. Yamshchikov, in Proceedings of the 29th International Congress on Applications of Lasers and Electrooptics, Anaheim, USA, p. 1257 (2010)Google Scholar
  11. 11.
    Yu.A. Zheleznov, T.V. Malinskiy, S.I. Mikolutskiy, Yu.V. Khomich, V.N. Tokarev, R.R. Khasaya, V.A. Yamshchikov, Appl. Phys. 3, 83 (2014). (in Russian)Google Scholar
  12. 12.
    V.N. Tokarev, V.Yu. Khomich, V.A. Shmakov, V.A. Yamshchikov, Phys. Chem. Mater. Treat. 4, 18 (2008). (in Russian)Google Scholar
  13. 13.
    V.Yu. Khomich, V.A. Shmakov, Phys. Uspekhi 58, 455 (2015)Google Scholar
  14. 14.
    D.V. Ganin, S.I. Mikolutskiy, V.N. Tokarev, V.Yu. Khomich, V.A. Shmakov, V.A. Yamshchikov, Quantum Electron. 44(4), 317 (2014)Google Scholar
  15. 15.
    J. Christian, in The Theory of Transformations in Metals and Alloys. Pergamon, Oxford, 1200 p. (1975)Google Scholar
  16. 16.
    M.A. Biot, Variational Principles in Heat Transfer. Oxford University Press, Oxford, 185 p. (1970)Google Scholar
  17. 17.
    S.I. Mikolutskiy, R.R. Khasaya, Yu.V. Khomich, V.A. Yamshchikov, J. Phys: Conf. Ser. 987, 012007 (2018)Google Scholar
  18. 18.
    Yu.A. Zheleznov, T.V. Malinskiy, Yu.V. Khomich, V.A. Yamshchikov, Inorg. Mater.: Appl. Res. 9(3), 460 (2018)Google Scholar
  19. 19.
    S.A. Ahmanov, V.I. Emel’yanov, N.I. Koroteev, V.N. Seminogov. Phys. Uspekhi 147, 675 (1985)Google Scholar
  20. 20.
    V.N. Elkin, T.V. Malinskiy, S.I. Mikolutskiy, R.R. Khasaya, Yu.V. Khomich, V.A. Yamshchikov, Phys. Chem. Mater. Treat. 6, 5 (2016). (in Russian)Google Scholar

Copyright information

© Springer Nature Switzerland AG 2020

Authors and Affiliations

  • Vladislav Khomich
    • 1
  • Vladimir Yamshchikov
    • 1
    Email author
  • Sergey Mikolutskiy
    • 1
  1. 1.Institute for Electrophysics and Electric Power RASSaint-PetersburgRussia

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