Mathematical Modeling and Numerical Simulation of a Double Touch-Mode Pressure Sensor with Graphene as the Sensing Element
- 8 Downloads
Touch mode capacitive pressure sensors have been a vital utilisation of Micro Electro Mechanical Systems (MEMS) offering better exhibitions on account of their efficiency, precision and utility. Graphene has been viewed as a promising material for MEMS because of its high elasticity, high tensile strength and tuneable elastic modulus. Graphene MEMS outperforms Silicon as Graphene can increase the sensitivity of the MEMS up to a great extent. This paper reports a Graphene and Aluminium nitride (AlN) based Double Touch Mode Capacitive Pressure Sensor (DTMCPS). A set of mathematical calculations has been presented for the sensor under study, so as to achieve high sensitivity. We used MATLAB in our paper to interpret theoretical evaluations in the form of graphical plots. This research aims at enhancing the performance of MEMS based DTMCPS so that they can be used for numerous industrial applications operating in a harsh environment.
KeywordsDouble Touch Mode Capacitive Pressure Sensor Graphene Sensitivity
- 6.Zhang, Y., Gui, Y., Meng, F., Gao, C., Hao, Y.: Design of a Graphene capacitive pressure sensor for ultra-low-pressure detection. In: 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (2016)Google Scholar
- 7.Eswaran, P., Malarvizhi, S.: MEMS capacitive pressure sensors: a review on recent development and prospective. Int. J. Eng. Technol. 5, 2734–2746 (2013)Google Scholar