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Mathematical Modeling and Numerical Simulation of a Double Touch-Mode Pressure Sensor with Graphene as the Sensing Element

  • Smiti Tripathy
  • Shiyona Dash
  • Sumit Kumar JindalEmail author
Conference paper
  • 8 Downloads
Part of the Advances in Intelligent Systems and Computing book series (AISC, volume 1122)

Abstract

Touch mode capacitive pressure sensors have been a vital utilisation of Micro Electro Mechanical Systems (MEMS) offering better exhibitions on account of their efficiency, precision and utility. Graphene has been viewed as a promising material for MEMS because of its high elasticity, high tensile strength and tuneable elastic modulus. Graphene MEMS outperforms Silicon as Graphene can increase the sensitivity of the MEMS up to a great extent. This paper reports a Graphene and Aluminium nitride (AlN) based Double Touch Mode Capacitive Pressure Sensor (DTMCPS). A set of mathematical calculations has been presented for the sensor under study, so as to achieve high sensitivity. We used MATLAB in our paper to interpret theoretical evaluations in the form of graphical plots. This research aims at enhancing the performance of MEMS based DTMCPS so that they can be used for numerous industrial applications operating in a harsh environment.

Keywords

Double Touch Mode Capacitive Pressure Sensor Graphene Sensitivity 

References

  1. 1.
    Jindal, S.K., Varma, M.A., Thukral, D.: Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilisation of SiC film as primary sensing element: mathematical modelling and numerical simulation. Microelectron. J. 73, 30–36 (2018)CrossRefGoogle Scholar
  2. 2.
    Dai, C.-L., Lu, P.-W., Chang, C., Liu, C.-Y.: Sensors 9, 10158–10170 (2009)CrossRefGoogle Scholar
  3. 3.
    van Spengen, W.M.: Microelectron. Reliab. 43, 1049–1060 (2003)CrossRefGoogle Scholar
  4. 4.
    Jindal, S.K., Raghuwanshi, S.K.: Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modeling and simulation. Microsyst. Technol. 23(1), 135–142 (2016)CrossRefGoogle Scholar
  5. 5.
    Berger, C., Phillips, R., Pasternak, I., Sobieski, J., Strupinski, W., Vijayaraghavan, A.: Touch-mode capacitive pressure sensor with Graphene-polymer heterostructure membrane. 2D Mater. 5, 015025 (2018)CrossRefGoogle Scholar
  6. 6.
    Zhang, Y., Gui, Y., Meng, F., Gao, C., Hao, Y.: Design of a Graphene capacitive pressure sensor for ultra-low-pressure detection. In: 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (2016)Google Scholar
  7. 7.
    Eswaran, P., Malarvizhi, S.: MEMS capacitive pressure sensors: a review on recent development and prospective. Int. J. Eng. Technol. 5, 2734–2746 (2013)Google Scholar

Copyright information

© The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG 2020

Authors and Affiliations

  • Smiti Tripathy
    • 1
  • Shiyona Dash
    • 1
  • Sumit Kumar Jindal
    • 1
    Email author
  1. 1.School of Electronics EngineeringVellore Institute of TechnologyVelloreIndia

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