Studying Effect of Adding Buffer Gases to TRIES Gas on the Electron Transport Coefficients
The electron transport coefficients in TRIES-Kr, TRIES-He, TRIES-Xe and TRIES-Ne mixtures were firstly calculated by using two-term approximation of the Boltzmann equation for the E/N (ratio of the electric field E to the neutral number density N) range of 0.1–1000 Td (Townsend). The influences of adding different amounts of inert gases on the electron transport coefficient of TRIES-inert gases mixtures are investigated for industrial purposes, specifically in plasma polymerization and plasma enhancing chemical vapour deposition.
KeywordsTriethoxysilane Boltzmann equation analysis Electron transport coefficients
- 16.Tuan, D.A.: Determination of electron collision cross sections for F2, Cl2 molecules, and electron transport coefficients in mixture gases as prospective substitutes for the SF6 gas in industrial applications. Ph.D. Dissertation, Dongguk Univ., Korea (2012)Google Scholar