Fabrication of Polymeric Micro Structures Using Improved Hot Embossing Technique
The paper proposes an improved hot embossing process of polymeric PMMA material using low-friction silicon molds, forcing and water-cooling subsystems integrated additionally, aiming to reduce total time of embossing cycle and extend lifetime of a master mold. The result of embossing experiments shows that the profile of PMMA micro structures (with a minimum feature size of 2 µm) using improved embossing process is sharper, higher aspect ratio and more uniformed than the counterparts, which use the traditional process without vacuum.
KeywordsPolymeric PMMA Hot embossing Silicon mold DRIE process
This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under Grant number ‘‘107.01-2019.05’’.
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