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Fabrication of Nanostructures

  • T. Daniel ThangaduraiEmail author
  • N. Manjubaashini
  • Sabu Thomas
  • Hanna J. Maria
Chapter
  • 98 Downloads
Part of the Engineering Materials book series (ENG.MAT.)

Abstract

This chapter explains the techniques that are available for fabricating nanostructures and also explain the substrates and wafers, modification of materials, lithography, film deposition, wet and dry etching, wafer bonding and packaging.

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Copyright information

© Springer Nature Switzerland AG 2020

Authors and Affiliations

  • T. Daniel Thangadurai
    • 1
    Email author
  • N. Manjubaashini
    • 2
  • Sabu Thomas
    • 3
  • Hanna J. Maria
    • 4
  1. 1.Department of Nanoscience and TechnologySri Ramakrishna Engineering CollegeCoimbatoreIndia
  2. 2.Department of Nanoscience and TechnologySri Ramakrishna Engineering CollegeCoimbatoreIndia
  3. 3.IIUCNNMahatma Gandhi UniversityKottayamIndia
  4. 4.IIUCNNMahatma Gandhi UniversityKottayamIndia

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