In this chapter the structures of the CoSi2, NiSi2, MoSi2, WSi2, FeSi2 and TiSi2 silicides are presented. Of these silicides CoSi2 and NiSi2 are cubic, MoSi2, WSi2 and FeSi2 are tetragonal while TiSi2 is orthorhombic. Two phases, C49 (base-centered orthorhombic) and the C54 (face-centered orthorhombic) are of importance, although the C49 variant is metastable. CoSi2 is by far the most important silicide phase because its low electrical resistivity. NiSi2 is also used for device applications. β-FeSi2 is of use in optoelectronics in Si-based devices. Electrical resistivity is the main characteristics of these silicides.
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